The following symbol is indicated on the controller to ensure safe use. CAUTION This symbol on the controller indicates that the operator must refer to an explanation in the user’s manual in order to avoid the risk of injury or death of personnel or damage to the instrument. The manual describes how the operator should exercise special care. MagnaTran 7.1 User’s Manual MN-003-1600-00 Brooks Automation Serial Number: Serial Number indicates date of construction of the MagnaTran™ 7.1. The first two characters are the year, next two characters are the month, remaining characters are a unique identifier. If there is no Serial Number.

• Brooks Controller Model 5876 User Manual Download
• Brooks Controller Model 5876 User Manual Pdf
• Brooks Controller Model 5876 User Manual Instructions

4-7

Brooks

Horizon ce5.2 elliptical user manual. ®

Mf Series

Brooks Controller Model 5876 User Manual Download

Section 4 Maintenance &

Troubleshooting

Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009

Brooks Controller Model 5876 User Manual Pdf

4-3 Sensor Tube

The sensor tube is part of a calibrated flow divider that is designed to
operate within a preset gas flow range. The Mfi Series sensor assembly
may be removed or replaced by referring to Section 4-4, disassembly and
assembly. If the sensor assembly is cleaned and reinstalled, a calibration
check should be performed. Refer to Section 3-4.

4-4 Disassembly and Assembly

The Mf Series mass flow controller and meter may be disassembled in the
field by the user for cleaning, re-ranging or servicing. Disassemble and
assemble the controller as follows:

Note: The Mf Series mass flow controller and meter should be
disassembled and assembled in a clean environment to prevent particulate
contamination.

Note: Due to the complexity of the Mf53, Mf63 and Mf64 restrictor and
bellows valve assemblies their disassembly and assembly procedures are
not fully described. It is recommended that these instruments be serviced
at the factory.

A. Disassembly (Mfx Series Sensor Assembly is Fixed)

The numbers in parentheses refer to the spare parts exploded view in
Figures 5-1 through 5-3.

1. Remove the cap nut (20) on top of the valve assembly. Loosen dome

nut on PG7 fitting (19) two turns counterclockwise. Remove PG7 fitting
from housing assembly and slide it onto the tubing until it contacts the
radius.

2. Disconnect the valve wires from the terminal (TB-3) and remove the

coil assembly (21).

3. Remove the hex socket screws (22) securing the valve retaining plate

(23) attaching the valve stem assembly (24).

When performing the following procedure, the valve stem must be
removed without cocking it to prevent damage to the valve
spring.

CAUTION

Brooks Controller Model 5876 User Manual Instructions